If you would like additional information, please contact:

Goddard Space Flight Center
Innovative Partnerships Program Office
Code 504
phone: (301) 286-5810
email: Innovative Partnerships Program Office

Thin Implantation-Chemical Vapor Deposition

Play audio + Physical Vapor Deposition-Evaporation + Sputtering - Chemical Vapor Deposition + Return to Thin Implantation The electron cyclotron resonance-based chemical vapor deposition system enables the deposition of dielectric films such as silicon dioxide and silicon nitride. This tool can allow substrate temperatures as low as 100 °C.		MENU + Ion Implantation - Thin Implantation + Plasma Etching + Wet Chemistry + Annealing + Photolithography + Safety CONTACTS